Optical Critical Dimension (OCD) spectroscopy is a key technology used for optical metrology and process control in semiconductor manufacturing. OCD enables measurements of the smallest semiconductor design features down to the nanometer level. At the heart of an OCD system is a high precision positioning system in the form of a highly integrated multi-axis stage system. The axes of the OCD’s stages are controlled by a compact embedded motion controller.
Working closely with the stage system designer, Allied Motion developed the advanced-performance custom motion controller module that powers the OCD system’s stages.